发明名称 |
Method for inspecting a reticle |
摘要 |
Disclosed is a method of inspecting a reticle for defects that occur over time. The invention accomplishes this by generating and storing a "baseline" image of the reticle and then periodically generating a "current" image of the reticle and comparing the current and baseline images. The baseline image is taken at a time when the reticle is known to be acceptable. This may be when the reticle has been "qualified" by an optical test or when a die fabricated by reticle has passed an electrical test. Also disclosed in a method for compacting the baseline image before storage.
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申请公布号 |
US6614520(B1) |
申请公布日期 |
2003.09.02 |
申请号 |
US19970993107 |
申请日期 |
1997.12.18 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
BAREKET NOAH;DESPLAT CHRISTIAN G.;GLASSER LANCE A. |
分类号 |
G01N21/956;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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