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发明名称
摘要
申请公布号
JP3441590(B2)
申请公布日期
2003.09.02
申请号
JP19960043231
申请日期
1996.02.29
申请人
发明人
分类号
H01L21/316;H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/316
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