,申请号JP19960276120-传众专利搜索

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发明名称
摘要
申请公布号	JP3442235(B2)	申请公布日期	2003.09.02
申请号	JP19960276120	申请日期	1996.10.18
申请人		发明人
分类号	F04B37/02;F04B9/00;H01L21/02;H01L21/302;H01L21/3065;(IPC1-7):H01L21/02	主分类号	F04B37/02
代理机构		代理人
主权项
地址

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