| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an adsorbing adaptor, where particles are scarcely produced, with high precision and good yield by particularly improving the structure of an adsorption plate based on a substratum molded by injection molding, and a method of manufacturing the same, in the adsorbing adaptor which vacuum-adsorbs a thin plate-like object to be adsorbed by mounting the same on the top of a vacuum pincette, and the method of manufacturing the same. <P>SOLUTION: The adsorbing adaptor 1 is characterized in that an adsorbing head 7 where a retention plate 8 is integrally bonded to an adsorption plate 3 where adsorption holes 10 are formed at the top of an adsorption nozzle section 5 where an adsorption channel is provided, a cavity 9 which communicates the adsorption holes 10 with the adsorption channel 4 is formed in the adsorption head 7, the adsorption plate 3 is formed of an injection molding where a number of small diameter adsorption holes 10 are formed at small pitches, and each of the adsorption holes 10 is formed in a truncated cone so as to allow the diameter of the hole to increase toward the side of the cavity 9. <P>COPYRIGHT: (C)2003,JPO</p> |
