发明名称 System, method and computer program product for automatically assessing experiment results
摘要 Systems, methods, and computer program products for analyzing experiment results obtained in a process are provided. The process is conducted separately in a first and second state of a control variable to generate a first and second plurality of experiment data, respectively. The experiment data corresponds to a plurality of attributes of the process. A processor is included in the systems for comparing the first and second plurality of experiment data, and identifying attributes having a statistically significant difference in their corresponding experiment data obtained in the first and second state of the process. The identified attributes are then compared with attributes expected to be affected by changes in the control variable, which are contained in a know-how database, in order to create a conformity database and a non-conformity database.
申请公布号 US6615157(B1) 申请公布日期 2003.09.02
申请号 US20000525555 申请日期 2000.03.15
申请人 PROMOS TECHNOLOGIES, INC.;MOSEL VITELIC INC.;SIEMENS AG 发明人 TSAI YUCHUAN
分类号 H01L21/302;H01L21/02;H01L21/66;(IPC1-7):G06F17/30 主分类号 H01L21/302
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