发明名称 METHOD FOR MANUFACTURING POLYGON REFLECTING MIRROR
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method, by which a precise optical surface can be machined without being affected by the shape and mounting error of a cutting edge of a tool. SOLUTION: When the tool 90 is turned about a tool axis AX, an annular region having a diameter of 2r (=W) corresponding to a cutting edge 93 is machined. When the tool 90 swings about a supporting point Oc located on an extended line of the tool axis AX while rotating about the tool axis AX, a spherical surface SS having a radius R of curvature is formed so as to correspond to the trajectory of an edge 94 of the cutting edge 93. That is to say, the target surface to be machined, i.e., the spherical surface SS, is scanned by the tool 90 such that the tool axis AX tilts in the direction of the normal line of the spherical surface SS. As a result, the spherical surface SS having the radius R of curvature from the supporting point Oc can be machined. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003245815(A) 申请公布日期 2003.09.02
申请号 JP20020049498 申请日期 2002.02.26
申请人 NIKON CORP 发明人 TAKINO HIDEO;TAKEUCHI YOSHIMI;HASHIMOTO YOSHINORI;KAWAI TOMOHIKO;SAWADA KIYOSHI
分类号 B23C3/16;B23C5/10;(IPC1-7):B23C3/16 主分类号 B23C3/16
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