| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid supply humidifier adapted to cleaning cloth capable of controlling the liquid content of cleaning cloth to hold the cleaning and humidification of a liquid cleaning matter to a suitable state. SOLUTION: The liquid supply humidifier adapted to cleaning cloth is constituted so that the contaminant adhering to the surface of matter is wipen off by the cleaning cloth humidified by the supply of a liquid and/or the liquid is supplied to the cleaning cloth in order to coat the surface of the matter with the liquid. This apparatus is equipped with a liquid supply member coming into contact with the cleaning point of the cleaning cloth or the vicinity thereof to supply the liquid to humidify the cleaning cloth and a means for supplying the liquid to the liquid supply member. COPYRIGHT: (C)2003,JPO
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