发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device includesa source region 4, a channel region 8, a drain region 5and a gate electrode which is patterned so that its side wall is tapered to be more narrow toward the top. A drift region 22 is formed between the channel region 8 and drain region 5 so as to be shallow below the gate electrode 7A (first N- layer 22A) and deep in the vicinity of the drain region 5 (second N- layer 22B).This configuration contributes to boosting the withstand voltage and reducing the "on" resistance of the semiconductor device.
申请公布号 US6614075(B2) 申请公布日期 2003.09.02
申请号 US20010852540 申请日期 2001.05.10
申请人 SANYO ELECTRIC CO., LTD. 发明人 AKAISHI YUMIKO;SUZUKI TAKUYA;MORI SHINYA;TSUKADA YUJI;WATANABE YUICHI;KIKUCHI SHUICHI
分类号 H01L21/266;H01L21/336;H01L29/10;H01L29/78;(IPC1-7):H01L29/78;H01L29/76;H01L29/94 主分类号 H01L21/266
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