发明名称 |
Semiconductor device and method of manufacturing the same |
摘要 |
A semiconductor device includesa source region 4, a channel region 8, a drain region 5and a gate electrode which is patterned so that its side wall is tapered to be more narrow toward the top. A drift region 22 is formed between the channel region 8 and drain region 5 so as to be shallow below the gate electrode 7A (first N- layer 22A) and deep in the vicinity of the drain region 5 (second N- layer 22B).This configuration contributes to boosting the withstand voltage and reducing the "on" resistance of the semiconductor device.
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申请公布号 |
US6614075(B2) |
申请公布日期 |
2003.09.02 |
申请号 |
US20010852540 |
申请日期 |
2001.05.10 |
申请人 |
SANYO ELECTRIC CO., LTD. |
发明人 |
AKAISHI YUMIKO;SUZUKI TAKUYA;MORI SHINYA;TSUKADA YUJI;WATANABE YUICHI;KIKUCHI SHUICHI |
分类号 |
H01L21/266;H01L21/336;H01L29/10;H01L29/78;(IPC1-7):H01L29/78;H01L29/76;H01L29/94 |
主分类号 |
H01L21/266 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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