| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To simplify the setting of a program in the controller side of a non- contact carrier apparatus, which determines the mounting and dismounting of a workpiece by a pressure change, and to improve the accuracy of detection of the workpiece. <P>SOLUTION: At the tip end of a carrier head 1, a workpiece holding surface 3 for holding a workpiece, a gas discharge section 5 provided at a position withdrawn from the workpiece holding suction 3 at the central portion of the carrier head, and a gas guide surface 6 connecting the gas discharge section 5 and the workpiece holding surface 3, are formed. The workpiece W is held by negative pressure generated by supplying air from the gas discharge section 5 along the gas guide surface 6. The gas discharge section 5 includes a nozzle 7 having a slit 11 opened so as to face the gas guide surface 6, and a pressure detecting port 19 which is opened toward the front face of the carrier head at the center of the nozzle 7 and is communicated with a pressure sensor 21. The pressure detecting port 19 is at the atmospheric pressure in the case where the workpiece is not held, and at negative pressure in the case where the workpiece is held. The presence and non-presence of the workpiece is detected by detecting the pressure at the pressure detecting port 19. <P>COPYRIGHT: (C)2003,JPO</p> |
