Single disc vapor lubrication

摘要

Vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a substrate, comprises the steps of:(a) providing an apparatus comprising:(i) a chamber having an interior space maintained below atmospheric pressure;(ii) a substrate loader/unloader for supplying the interior space with at least one substrate and for withdrawing at least one substrate from the interior space;(iii) at least one lubricant vapor source for supplying the interior space with a stream of lubricant vapor; and(iv) a substrate transporter/conveyor for continuously moving at least one substrate past the stream of vapor from the at least one lubricant vapor source;(b) supplying the interior space with a substrate having at least one surface;(c) continuously moving the substrate past the stream of lubricant vapor and depositing a uniform thickness thin film of the lubricant on the at least one surface; and(d) withdrawing the lubricant-coated substrate from the interior space.The invention has particular utility in depositing thin films of polymeric lubricants onto disc-shaped substrates in the manufacture of magnetic and MO recording media.