发明名称 Transistor having a gate stack comprised of a metal, and a method of making same
摘要 The present invention is generally directed to a transistor having a gate stack comprised of a metal, and a method of making same. In one illustrative embodiment, the transistor is comprised of a gate stack comprised of a gate insulation layer positioned above a semiconducting substrate, a layer of silicon positioned above the gate insulation layer, a layer of adhesion material positioned above the layer of silicon, a layer of metal positioned above the layer of adhesion material, and a plurality of source/drain regions formed in the substrate adjacent the gate stack.
申请公布号 US6614064(B1) 申请公布日期 2003.09.02
申请号 US20020060422 申请日期 2002.01.30
申请人 ADVANCED MICRO DEVICES, INC. 发明人 BESSER PAUL R.;BRENNAN WILLIAM S.
分类号 H01L21/28;H01L29/49;(IPC1-7):H01L29/72 主分类号 H01L21/28
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