| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easily manageable setter for firing AlN in which AlN is hard to be precipitated even when repeatedly used at high temperatures of ≥2,000°C, and has an elongated service life. <P>SOLUTION: The setter material for firing aluminum nitride consists of a hexagonal boron nitride sintered compact, and in at least one face, when X-rays are made incident so that the incident X-rays and diffraction X-rays are symmetrical with respect to the normal of the same face, the peak intensity ratio between the (002) diffraction rays and the (100) diffraction rays, I(<SB>002</SB>)/I(<SB>100</SB>) is 30 a 150. The above setter material is produced by subjecting the raw material of hexagonal boron nitride powder having a graphitization index of 1.5 to 5.0 to uniaxial pressing under the pressure of ≥5 MPa to produce a green compact in which hexagonal boron nitride particles are oriented, and thereafter performing pressureless sintering thereto. The setter for firing aluminum nitride consists of a vessel assembled with the above setter material, and, in the inner wall face, the peak intensity ratio, I(<SB>002</SB>)/I(<SB>100</SB>) is 30 to 150. <P>COPYRIGHT: (C)2003,JPO |
