发明名称
摘要 Electrical connection between two faces of a substrate and manufacturing process.The connection is made by a part (46) of a conducting or semi conducting substrate (20) completely surrounded by at least one electrically insulating trench (32, 36, 44). A contact pad (42) is located on the back face (40) and conducting tracks (38) are located on the front face. The connection is made through the substrate itself.Application to the manufacture of circuits, components, sensors, etc.
申请公布号 JP2003526207(A) 申请公布日期 2003.09.02
申请号 JP20010564390 申请日期 2001.02.27
申请人 发明人
分类号 H01L23/52;H01L21/3205;H01L21/768;(IPC1-7):H01L21/320 主分类号 H01L23/52
代理机构 代理人
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