发明名称 Semiconductor testing apparatus
摘要 A semiconductor testing apparatus including a server, a robot arm, a gearing unit, a drive unit, a transmission unit, a control unit and a testing head. The drive unit drives the gearing unit and the transmission unit so as to rotate the testing head. In addition, the control unit controls the driving speed and driving direction of the drive unit so as to control the rotation speed and rotation direction of the testing head.
申请公布号 US6614222(B1) 申请公布日期 2003.09.02
申请号 US20020321360 申请日期 2002.12.18
申请人 SILICON INTEGRATED SYSTEMS CORP. 发明人 YU CHENG-JI;TSAI SHOU-NAN;JANG CHING-YUH
分类号 G01R31/28;(IPC1-7):G01F11/00 主分类号 G01R31/28
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