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发明名称
摘要
申请公布号
JP3441372(B2)
申请公布日期
2003.09.02
申请号
JP19980195370
申请日期
1998.07.10
申请人
发明人
分类号
H01L21/306;C23F4/00;H01L21/02;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):C23F4/00
主分类号
H01L21/306
代理机构
代理人
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地址
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