METHOD AND DEVICE FOR MOVING AND LOADING RETICLE BY USING RETICLE END EFFECTOR OF ROBOT

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for moving and loading a reticle which is preliminarily aligned on a reticle exposure stage without impairing the preliminary alignment. SOLUTION: This method for moving and loading a reticle onto a receptive station of the reticle comprises a process (a) wherein the reticle is retrieved from a storage facility by using an end effector having a reticle plate coupled on a mounting plate by which the end effector is connected with a robot arm, a process (b) wherein the reticle is mounted on the reticle plate after the reticle is preliminarily aligned on an off-line alignment station, and a process (c) wherein the reticle is moved from the off-line alignment station to the receptive station as the preliminary alignment is maintained and rigidity during the movement is provided. COPYRIGHT: (C)2003,JPO