| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reticle hard to break even in the case that a membrane region is provided in the neighborhood of the outer periphery of the reticle in the reticle used for charged particle beam transfer exposure of an electron beam, an ion beam or the like. <P>SOLUTION: In the reticle having a plurality of membrane regions supported with a support part, a deep groove or a through hole is provided in the support part in the neighborhood of the membrane region nearest to the outer periphery of the reticle. <P>COPYRIGHT: (C)2003,JPO</p> |
