| 摘要 |
PROBLEM TO BE SOLVED: To prevent the adhesion of dust from a drive part such as a lift up and down drive part of a single-transfer device to a wafer on an unmanned conveying cart. SOLUTION: A single-transfer device 5 which comprises a base 21 disposed in a conveying card body, a lift up and down unit 15 for lifting up and down along the base 21, and robot hands 30M, 30S disposed on the lift up and down unit 15 is mounted on the conveying cart. A fan 54 for sucking air in a gap 100 between the lift up and down unit 15 and the base 21 is provided in the conveying cart body, and a cover 27 for covering a side of the lift up and down unit 15 is provided in a conveying cart body 3. A cylindrical body enclosing with lift up and down unit 15 is constituted with the cover 27 and the base part 21, and fans 54, 54 are provided. An opening 29 formed in the outer periphery of the cylindrical body is interconnected with the fan 54. COPYRIGHT: (C)2003,JPO |
