| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage whose moving range can be extended and which can be moved in an arbitrary direction in an X-Y two-dimensional plane with a simple structure, and to provide an ultrasonic motor used for the stage. <P>SOLUTION: This stage has a stator, a mover which is movable relatively to the stator, and an ultrasonic motor which is attached to the mover and generates a driving force for moving the mover. <P>COPYRIGHT: (C)2003,JPO |
