| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate treatment device which carries out highly precise treatment and does not generate static electricity. <P>SOLUTION: A body 2 of a substrate treatment device 1 is provided with; an integrated stone stage 3 which less changes its shape due to a temperature change and prevents the generation of static electricity at a substrate 90; a bridge structure 4 having a discharge system 40 for discharging a resist solution and elevating mechanisms 44, 45 for making the discharge system 40 move up and down in the Z-axial direction; linear motors 50, 51 for moving the bridge structure 4 in the X-axial direction; and a pair of traveling rails 31 in both sides of the holding surface 30 of the stage 3. When the substrate 90 is treated, the stage 3 holds the substrate 90 in a prescribed position and a control system 6 controls the position of the discharge system 40. <P>COPYRIGHT: (C)2003,JPO |
