| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for suppressing variation in dimensions in wet etching of polyimide in the production of wiring-integrated suspension. SOLUTION: In this production method, a surface of an insulation layer is smoothed and, thereby, the insulation layer is stabilized by perceiving a surface active agent and utilizing the effect of the surface active agent in order to etch the insulation layer with excellent working precision on the production of wiring-integrated suspension. COPYRIGHT: (C)2003,JPO
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