发明名称 SIMILAR PERIODIC PATTERN INSPECTION DEVICE AND INSPECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To dispense with the preparation of a reference pattern or a judgment threshold pattern. <P>SOLUTION: This device has an imaging apparatus 2; an image processor 3 for inputting the data of the imaging apparatus 2; and a position detector 4 for outputting a carrying position detection signal PG. The image processor 3 comprises an image memory 31; an image memory write control circuit 32 for storing the data in the image memory 31; a small block memory 34 for dividing the data in the image memory 31 into small blocks followed by storing; a middle block memory 35 for storing middle blocks; a middle block N-value memory 36A for performing N-value processing of the middle block memory 35 with an N-value processing threshold determined by dividing the difference between standard deviation maximum value and minimum value of the middle blocks by N; a middle block carrying directional projection memory 36B for storing the total value of middle blocks of the same position on the scanning direction of N-value processing; and a scanning direction projection memory 37 for dividing the center part of the middle blocks of the same position into three parts in the scanning direction and storing the scanning directional total value. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003242511(A) 申请公布日期 2003.08.29
申请号 JP20020041603 申请日期 2002.02.19
申请人 NEC CORP 发明人 FURUYA SHINICHI
分类号 G01B11/24;G01N21/956;G06T1/00;G06T7/00;H01L21/66 主分类号 G01B11/24
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