| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit generation of foreign objects from a plasma treatment chamber that is operated as an earth electrode or components in the plasma treatment chamber. <P>SOLUTION: In a plasma treatment apparatus for generating plasma in a treatment chamber and for treating a sample, a surface that is made of a metal conductor that is grounded and is in contact with plasma in a plasma treatment chamber 1 is covered with plasma-resistant macromolecular materials (protection films) 14 and 105 where relationship between a relative dielectric constant kε and a thickness t (μm) is expressed by t/kε<300. Additionally, a protection film 105 that is formed by a resin material that has plasma resistance and water absorption properties is expanded and shrunk for adhering and fixing to an outer surface of components in the treatment chamber 1. <P>COPYRIGHT: (C)2003,JPO |
