| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device of a single substrate which reduces the bending of the single substrate such as a large-sized glass substrate by its own weight, and can prevent the deformation or damage of the single substrate caused by bending stress. SOLUTION: In a transfer device of a single substrate 5, support parts are extended toward a facing direction from both sides of a housing device 1, whereas a hand 4 of a tranferrer inserted into the housing device 1 goes up and down between support part to enter or exit the lead substrate. The support part is constituted of a plurality of parallel support members 3a, 3b formed with a gap between the facing support parts, and the hand 4 is constituted of a plurality of widthwise lateral hand support members 41 located between the parallel support members 3a, 3b at a going up and down position of the hand 4, and a longitudinal hand support member 42 located between the facing support members 3a, 3b for connecting the lateral hand support members 41. COPYRIGHT: (C)2003,JPO |
