| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device using a non-electromagnetic actuator having a simple structure and excellent controllability and to provide an aligner. <P>SOLUTION: An inch worm type actuator 1 driving a slider comprises two segments 10 and 20. Each segment has press parts 13 and 23 contacted on a guide bar from the slider and pressing the slider in the longitudinal direction of the guide bar, first piezoelectric elements 11 and 21 for pressing and separating the press parts on and from a guide bar surface, and second piezoelectric elements 12 and 22 for pushing the press parts in the longitudinal direction of the guide bar. <P>COPYRIGHT: (C)2003,JPO |
