| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a bipolar electrostatic chuck which does not suffer from a problem such as the deterioration of attraction performance due to dielectric breakdown between electrodes and is excellent in reliability. <P>SOLUTION: A bipolar electrostatic chuck has a pedestal 1; a lower insulation layer 2 formed on the upper surface of the pedestal 1 by flame-spraying; a first electrode 3a and a second electrode 3b formed on the insulation layer 2 adjacent each other; and an upper insulation layer 4 formed on the lower insulation layer 2 by flame-spraying to cover the electrodes 3a and 3b. In the bipolar electrostatic chuck, one insulating member 5 is disposed between the periphery of the first electrode 3a and the periphery of the second electrode 3b facing each other to cross both the lower insulation layer 2 and the upper insulation layer 4. <P>COPYRIGHT: (C)2003,JPO</p> |
