| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer boat which can fix a supporting rod to an end plate surely without increasing the size of a supporting rod and without tilting the supporting rod. <P>SOLUTION: A cam stopper 3 is rotated with a first piece member 4 supporting the lower part of a supporting rod 1 in contact with the upper surface 2a of an end plate 2, and the supporting rod 1 is fixed to the end plate 2 by pressing the vertical edge face of the supporting rod 1 against a side wall of a through hole 2b. <P>COPYRIGHT: (C)2003,JPO</p> |
