| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state image pickup element and its manufacturing method wherein the number of processes is reduced as compared with the conventional case, cost reduction is enabled, light shielding capability to an output part is improved, and decrease of reliability can be prevented. SOLUTION: An FD electrode 55 as wiring for leading out a signal which is connected with an FD region of the output part 35 is formed before a flattening film 57 covering transfer electrodes 47, 48 is formed. A first light shielding part 58A and a second light shielding part 58B which cover a horizontal transfer register 34 and a reset gate 53 of the output part 35, respectively, are formed on the flattening film 57 by using a common light shielding film 58. The FD electrode 55 is constitutes of high melting point metal material (e.g. tungsten) which can endure flattening heat treatment of the flattening film 57. COPYRIGHT: (C)2003,JPO
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