| 摘要 |
PROBLEM TO BE SOLVED: To enable high speed transfer of electric charges by reducing electric resistance of a transfer electrode in the case of microminiaturization, in a solid- state image pickup element capable of reading all picture elements. SOLUTION: A light receiving part adjacent to a light receiving part 105 is arranged at a position where one-half of a picture element pitch in a horizontal direction and in a vertical direction is shifted. Picture element arrangement in the light receiving part 105 is made a honeycomb type. In this so-called honeycomb CCD, metal wiring 125 is electrode material whose resistivity is smaller than that of transfer electrodes 111-114 constituted of two-layer polysilicon electrode. The metal wiring 125 is laminated and arranged in the transversal direction along the longitudinal direction of the transfer electrodes 111-114. Corresponding to each of the transfer electrodes 111-114, the metal wiring is connected by using contact holes 126. As a result, the electric resistance is reduced without thickening the polysilicon layer of the transfer electrodes 111-114. COPYRIGHT: (C)2003,JPO
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