| 摘要 |
PROBLEM TO BE SOLVED: To improve the isolation characteristic of a micro-relay driven by the electrostatic attraction, and to prevent a movable contact from being attracted to a grounding contact. SOLUTION: Fixed contacts 52 and 53, a movable contact 60, a grounding contact 70, a fixed electrode 56, a movable plate 57, etc., are built on a fixed substrate 51. The grounding contact 70 is located over the movable contact 67. During the drive, the movable contact 60 is brought into contact with the grounding contact 70 when it is detached from the fixed contacts 52 and 53. During the non-drive, the movable plate 57 is in a horizontal condition without any deflection, and the movable contact 60 is detached from the grounding contact 70. COPYRIGHT: (C)2003,JPO
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