| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress waiting time so as to improve an operating rate by preliminarily creating a schedule based on a process plan before beginning a processing. <P>SOLUTION: After arranging an initial processing process 1-A for any lot, with assuming the arrangement of the next processing processes 1-B, 2-A except the initial processing process 1-A, by calculating scheduled end time E1, E2 of the preceding processing processes beforehand, the processing process 2-A for a lot having the earliest scheduled end time among each lot is arranged as the next processing process. By selecting and arranging the processing process of the lot of which the preceding processing process finishes earlier, the time until finishing the next processing process is shortened. Because a substrate treatment device of a substrate treatment system is effectively used, the waiting time is suppressed to improve the operating rate. <P>COPYRIGHT: (C)2003,JPO</p> |
