| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that, when a size of a substrate to be treated becomes larger, a foot print (a planar area required for treatment) of a laser beam irradiating device which moves a stage on which the substrate is set up in the X- or Y-direction becomes remarkably larger proportionally to the substrate, resulting in a huge size of the whole body of a device. <P>SOLUTION: A laser beam irradiating device scans a semiconductor film by projecting a laser beam upon the film by means of a galvano-mirror or polygon mirror. In addition, the device maintains an incident angleθof the laser beam to the semiconductor film at a certain angle when the device projects the laser beam upon the film. <P>COPYRIGHT: (C)2003,JPO</p> |
