摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillatory wave motor by which driving performance is improved and man-hours for an assembly adjustment are reduced. <P>SOLUTION: The motor includes a vibrator 11, which has a piezoelectric material 13 excited by a driving signal and an elastic body that is joined to the piezoelectric material 13 and that generates a progressive oscillatory wave on a driving surface by the excitation, and a mover which is pressed and put into contact with the driving surface of an elastic body 12 and is driven by the progressive oscillatory wave, wherein the elastic body 12 has a plurality of grooves 12a on the driving surface side. When the average thickness of each groove from the joining face 12e of the piezoelectric material 13 to a groove's bottom 12d of the groove 12a is defined to be tm and a dispersion range of the thickness is defined to be Δt, Δt/tm is arranged to have dispersion of 0.01 or smaller. <P>COPYRIGHT: (C)2003,JPO |