发明名称 OSCILLATORY WAVE MOTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an oscillatory wave motor by which driving performance is improved and man-hours for an assembly adjustment are reduced. <P>SOLUTION: The motor includes a vibrator 11, which has a piezoelectric material 13 excited by a driving signal and an elastic body that is joined to the piezoelectric material 13 and that generates a progressive oscillatory wave on a driving surface by the excitation, and a mover which is pressed and put into contact with the driving surface of an elastic body 12 and is driven by the progressive oscillatory wave, wherein the elastic body 12 has a plurality of grooves 12a on the driving surface side. When the average thickness of each groove from the joining face 12e of the piezoelectric material 13 to a groove's bottom 12d of the groove 12a is defined to be tm and a dispersion range of the thickness is defined to be &Delta;t, &Delta;t/tm is arranged to have dispersion of 0.01 or smaller. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003244974(A) 申请公布日期 2003.08.29
申请号 JP20020040231 申请日期 2002.02.18
申请人 NIKON CORP 发明人 ASHIZAWA TAKATOSHI;OTSUKA SHINICHI;SUGANUMA RYOICHI
分类号 H02N2/00 主分类号 H02N2/00
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