| 摘要 |
PROBLEM TO BE SOLVED: To reliably monitor presence or absence of generation of abnormal discharge. SOLUTION: An abnormal discharge-detecting apparatus 10 detects an abnormality in discharge that is generated in a chamber 14 having a window 12 made of glass, and is provided with a reception antenna 18 for receiving electromagnetic waves E due to discharge via the window 12. A detector 20 as a detection means for outputting the electromagnetic waves E that are received by the reception antenna 8 as an electric signal S. The presence or absence of abnormal discharge can be reliably monitored by capturing the electromagnetic waves E that are generated in the chamber 14 by the reception antenna 18 via the window 12. In this case, since no high-frequency currents are used for the detection, discharge due to static electricity or the like other than discharge that is generated in an anode 24 or a cathode 26 can be reliably detected. COPYRIGHT: (C)2003,JPO
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