| 摘要 |
PROBLEM TO BE SOLVED: To prevent rear surfaces of objects to be treated from being scratched in a product area and, in addition, to suppress occurrence of slips to peripheries of the objects. SOLUTION: A boat 10 for heat treatment is constituted by forming groove sections 14 and 15 having object holding surfaces 14a and 15a at prescribed vertical intervals on a plurality of supports 12 and 13 disposed on both sides and backside of objects (w) so as to hold a number of objects (w) in multiple stages. The object holding surfaces 15a of the supports 13 on both sides of the objects (w) are made longer in length along peripheral directions of the objects (w) by making the supports 13 broader in width by extending the supports 13 to the front sides of the objects (w) than centers of the objects (w). In addition, the object holding surfaces 14a and 15a of the supports 12 and 13 on both sides and backside of the objects (w) are downwardly inclined toward the centers of the objects (w). COPYRIGHT: (C)2003,JPO
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