发明名称 |
PRETREATMENT METHOD FOR POLYIMIDE ETCHING |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing suspension blanks with wiring for hard disks which can perform polyimide etching with high accuracy. SOLUTION: The method of manufacturing the suspension blanks with wiring for the hard disks by using a laminate of a three-layered structure laminated with a conductive layer across an electrical insulation layer on a metallic layer to develop spring characteristics comprises subjecting the surface of the insulation layer on the metallic layer surface side to preetching to decrease the differences in etching rates, thereby performing the polyimide etching with the high accuracy. COPYRIGHT: (C)2003,JPO
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申请公布号 |
JP2003242620(A) |
申请公布日期 |
2003.08.29 |
申请号 |
JP20020034822 |
申请日期 |
2002.02.13 |
申请人 |
FUCHIGAMI MICRO:KK |
发明人 |
KOSHIMUTA SATOSHI;ONO TERUO;TSURUGASAKI MASATO |
分类号 |
G11B5/60;G11B21/21;(IPC1-7):G11B5/60 |
主分类号 |
G11B5/60 |
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