| 摘要 |
The invention relates to a storage and buffer system (12) for connection to transport units for containers, such as for example, cassettes (7), FOUP pods (8), or SMIF boxes for the storage of wafers (9) and similar, comprising a number of conveyor elements (1), arranged along a conveyor line (13), whereby the conveyor elements (1) are arranged in at least one storage line (14), running essentially horizontal, next to, under or over the transport line (13), whilst maintaining a transfer position relative to the adjacent conveyor elements (1). The system further comprise a means of rotation (17) with at least one conveyor element (1), by means of which the containers (7,8) can be transferred in a horizontal direction from the conveyor line (13) to a storage line (14)and a vice versa, or from one storage line to another.
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