Production of a cover for a region of a substrate used for a SAW or BAW filter or a micromechanical element comprises forming a frame structure in the region of the substrate, and applying a lid structure on the frame structure

摘要

Production of a cover for a region of a substrate (10) comprises forming a frame structure (18) in the region of the substrate, and applying a lid structure (20) on the frame structure so that the region between the lid structure and the substrate is covered. An Independent claim is also included for a process for the production of a housed component comprising preparing a substrate with a component, forming a cover as above for a region of the substrate, and completing the housed component by applying a material which does not penetrate the region between the lid structure and the substrate.