摘要 |
The invention especially relates to a semiconductor component, such as especially a humidity sensor (200, 300, 400, 500, 600, 700, 800), comprising a semiconductor substrate (101), especially consisting of silicon for example, a first electrode (102), a second electrode (202), and at least one first layer (101) which can be accessed by a medium which acts on the semiconductor component from outside. The first layer is at least partially arranged between the first and the second electrode. In order to especially reduce the production costs of said semiconductor component, the first layer comprises pores (301) in which the medium at least partially passes. |
申请人 |
ROBERT BOSCH GMBH;BENZEL, HUBERT;WEBER, HERIBERT;SCHAEFER, FRANK |
发明人 |
BENZEL, HUBERT;WEBER, HERIBERT;SCHAEFER, FRANK |