发明名称 SEMICONDUCTOR COMPONENT ACTING AS CAPACITIVE HUMIDITY SENSOR, AND METHOD FOR PRODUCING THE SAME
摘要 The invention especially relates to a semiconductor component, such as especially a humidity sensor (200, 300, 400, 500, 600, 700, 800), comprising a semiconductor substrate (101), especially consisting of silicon for example, a first electrode (102), a second electrode (202), and at least one first layer (101) which can be accessed by a medium which acts on the semiconductor component from outside. The first layer is at least partially arranged between the first and the second electrode. In order to especially reduce the production costs of said semiconductor component, the first layer comprises pores (301) in which the medium at least partially passes.
申请公布号 WO03009334(A3) 申请公布日期 2003.08.28
申请号 WO2002DE02481 申请日期 2002.07.06
申请人 ROBERT BOSCH GMBH;BENZEL, HUBERT;WEBER, HERIBERT;SCHAEFER, FRANK 发明人 BENZEL, HUBERT;WEBER, HERIBERT;SCHAEFER, FRANK
分类号 G01N27/22;G01N27/12 主分类号 G01N27/22
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