| 摘要 |
<p>A fluid control module (10) connected in-line within a chemically corrosive or ultra pure fluid flow circuit that delivers fluids in either a liquid or gaseous state. The fluid control module utilized to control the flow, pressure or volume of fluid flowing through the fluid flow circuit and automatically adjusting or 'calibrating' the module to compensate for changes in the atmospheric pressure or drift in the pressure sensors (20) of the fluid control module. The fluid control module also includes a rapid and macro adjustment of the control valve to reach the desired flow rate at a quicker pace.</p> |
