VERFAHREN ZUR ERHÖHUNG DER AUSBEUTE BEI VERFAHREN ZUR ABSCHEIDUNG VON DÜNNEN SCHICHTEN AUF EINEM SUBSTRAT,申请号DE20006000873T-传众专利搜索

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发明名称	VERFAHREN ZUR ERHÖHUNG DER AUSBEUTE BEI VERFAHREN ZUR ABSCHEIDUNG VON DÜNNEN SCHICHTEN AUF EINEM SUBSTRAT
摘要
申请公布号	DE60000873(T2)	申请公布日期	2003.08.28
申请号	DE20006000873T	申请日期	2000.04.11
申请人	SAES GETTERS S.P.A., LAINATE	发明人	CONTE, ANDREA;MAZZA, FRANCESCO;MORAJA, MARCO
分类号	B01J19/00;C23C14/00;C23C14/54;C23C14/56;C23C16/44;F04B37/04;(IPC1-7):C23C14/56	主分类号	B01J19/00
代理机构		代理人
主权项
地址

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