发明名称 |
Optical metrology target design for simultaneous measurement of multiple periodic structures |
摘要 |
An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second periodic structure has at least two features and a second pitch. The optical metrology target is illuminated with a light source, and an optical signal from the optical metrology target is received and analyzed.
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申请公布号 |
US2003160163(A1) |
申请公布日期 |
2003.08.28 |
申请号 |
US20020083877 |
申请日期 |
2002.02.25 |
申请人 |
WONG ALAN;CAO GARY X.;EISERER REX |
发明人 |
WONG ALAN;CAO GARY X.;EISERER REX |
分类号 |
G02B27/46;(IPC1-7):H01J3/14 |
主分类号 |
G02B27/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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