发明名称 Apparatus for plasma treatment of dielectric bodies
摘要 In order to allow a continuous production process for the plasma treatment of workpieces, an apparatus for plasma treatment of workpieces is provided which comprises a transport device and a plasma generating device which injects electromagnetic energy into an area of the apparatus during operation, in which the transport device carries the workpieces through the area continuously.
申请公布号 US2003159654(A1) 申请公布日期 2003.08.28
申请号 US20030349361 申请日期 2003.01.21
申请人 ARNOLD GREGOR;BEHLE STEPHAN;BICKER MATTHIAS;LUTTRINGHAUS-HENKEL ANDREAS 发明人 ARNOLD GREGOR;BEHLE STEPHAN;BICKER MATTHIAS;LUTTRINGHAUS-HENKEL ANDREAS
分类号 H05H1/24;B01J3/00;B01J19/08;B65D23/02;C23C16/04;C23C16/509;C23C16/54;H01L21/677;H05H1/46;(IPC1-7):C23C16/00 主分类号 H05H1/24
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