发明名称 Baths for producing microstructures
摘要 A bath for generating microstructures which is required in numerous fields of application of the microsystem technique and in microstructuring offers a less expensive alternative to known conventional approaches and disposal of the used bath may be carried out in a manner more environmentally friendly manner than in the previous methods for manufacture of microstructures. The bath includes at least one biogenic agent (in particular, an enzyme) which acts upon a preselectable thin layer.
申请公布号 US2003161789(A1) 申请公布日期 2003.08.28
申请号 US20030397151 申请日期 2003.03.26
申请人 CLONDIAG CHIP TECHNOLOGIES GMBH 发明人 ERMANTRAUT EUGEN;KOHLER JOHANN MICHAEL;SCHULZ TORSTEN;WOHLFART KLAUS
分类号 G03F7/26;C12M1/00;C12N11/02;C12N11/14;C23F1/14;G03F7/00;H01L21/308;(IPC1-7):A61L9/04 主分类号 G03F7/26
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