发明名称 |
Baths for producing microstructures |
摘要 |
A bath for generating microstructures which is required in numerous fields of application of the microsystem technique and in microstructuring offers a less expensive alternative to known conventional approaches and disposal of the used bath may be carried out in a manner more environmentally friendly manner than in the previous methods for manufacture of microstructures. The bath includes at least one biogenic agent (in particular, an enzyme) which acts upon a preselectable thin layer.
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申请公布号 |
US2003161789(A1) |
申请公布日期 |
2003.08.28 |
申请号 |
US20030397151 |
申请日期 |
2003.03.26 |
申请人 |
CLONDIAG CHIP TECHNOLOGIES GMBH |
发明人 |
ERMANTRAUT EUGEN;KOHLER JOHANN MICHAEL;SCHULZ TORSTEN;WOHLFART KLAUS |
分类号 |
G03F7/26;C12M1/00;C12N11/02;C12N11/14;C23F1/14;G03F7/00;H01L21/308;(IPC1-7):A61L9/04 |
主分类号 |
G03F7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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