| 发明名称 |
Contamination suppression in chemical fluid deposition |
| 摘要 |
Methods for depositing materials onto a substrate surface or into a porous solid are disclosed. These methods include suppressing contamination of the deposited materials.
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| 申请公布号 |
US2003161954(A1) |
申请公布日期 |
2003.08.28 |
| 申请号 |
US20020327515 |
申请日期 |
2002.12.20 |
| 申请人 |
BLACKBURN JASON M.;CABANAS ALBERTINA;WATKINS JAMES J. |
发明人 |
BLACKBURN JASON M.;CABANAS ALBERTINA;WATKINS JAMES J. |
| 分类号 |
C23C16/18;C23C16/52;C23C18/08;C23C18/40;H01L21/285;(IPC1-7):B05D5/12;B05D3/10 |
主分类号 |
C23C16/18 |
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