发明名称 Light modulator and method of manufacturing the same
摘要 A method of manufacturing a light modulator in which micromirrors are tilted by an electrostatic force generated by an electrical potential difference between drive electrodes and the micromirrors. The method includes integrally forming support sections disposed at fulcrum points for tilting the micromirrors and axis portions forming axes for tilting the micromirrors.
申请公布号 US2003161027(A1) 申请公布日期 2003.08.28
申请号 US20020171620 申请日期 2002.06.17
申请人 SEIKO EPSON CORPORATION 发明人 KUROSAWA RYUICHI;KAMISUKI SHINICHI
分类号 B81B5/00;B81C3/00;G02B26/08;(IPC1-7):G02B26/00 主分类号 B81B5/00
代理机构 代理人
主权项
地址