发明名称 |
Systems and methods for overcoming stiction |
摘要 |
A number of methods and systems for overcoming stiction are provided. The systems include electromechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
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申请公布号 |
US2003160540(A1) |
申请公布日期 |
2003.08.28 |
申请号 |
US20020087040 |
申请日期 |
2002.02.28 |
申请人 |
NETWORK PHOTONICS, INC. |
发明人 |
MILLER DAVID;MULLER LILAC;ANDERSON ROBERT L. |
分类号 |
B81B3/00;G02B6/35;G02B26/08;H02N1/00;H02N2/00;(IPC1-7):H02N1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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