发明名称 Configurable vacuum system and method
摘要 An exemplary configurable vacuum system is provided for use in coating or plating that provides the capability and versatility to handle substrates of significantly different shapes and sizes. The configurable vacuum system includes a vacuum table assembly, a mechanical drive, an electrical feed through, a filament, and a vacuum chamber. The vacuum table assembly may include a support frame, a sliding means, such as a roller or rollers, an insulated surface, and a platform operable to rotate and support the substrate. The mechanical drive is operable to rotate the platform, the electrical feed through provides an electrical signal to the substrate, and the filament is positioned relative the substrate. The vacuum chamber includes a main opening, an internal volume, and a receiving means, such as a railing or member, operable to receive and support the vacuum table assembly within the internal volume of the vacuum chamber and through the sliding means of the vacuum table assembly.
申请公布号 US2003159926(A1) 申请公布日期 2003.08.28
申请号 US20030369446 申请日期 2003.02.17
申请人 KIDD JERRY D.;HARRINGTON CRAIG D.;HOPKINS DANIEL N. 发明人 KIDD JERRY D.;HARRINGTON CRAIG D.;HOPKINS DANIEL N.
分类号 C23C14/24;C23C14/26;C23C14/32;C23C14/34;C23C14/50;H01J37/32;(IPC1-7):C23C16/00 主分类号 C23C14/24
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