| 摘要 |
<p>A chemical mechanical planarization system includes a point of use chemical mixing system (210), a first and a second pump (214), a first and a second flow sensor (216, 236), a mixer (220) and a controller (240). The first pump (214) has an input coupled to a first chemical supply (101) and the first flow sensor (216) coupled to the output of the first pump (214). The second pump (234) has an input coupled to a second chemical supply (103) and the second flow sensor (236) coupled to the output of the second pump (234). The mixer (220) has inputs coupled to the output of the first and second flow sensors (216, 236). The controller (240) is configured to receive signals from the first and second flow sensors (216, 236) and to produce control signals for the first and second pumps (214, 234) and the mixer (220).</p> |
