发明名称 Reduced mask count buried layer process
摘要 An N type buried layer is formed, in one embodiment, by a non selective implant on the surface of a wafer and later diffusion. Subsequently, the wafer is masked and a selective P type buried layer is formed by implant and diffusion. The coefficient of diffusion of the P type buried layer dopant is greater than the N type buried layer dopant so that connections can be made to the P type buried layer by P wells which have a lower dopant concentration than the N buried layer.
申请公布号 US2003162360(A1) 申请公布日期 2003.08.28
申请号 US20020082852 申请日期 2002.02.25
申请人 BEASOM JAMES D. 发明人 BEASOM JAMES D.
分类号 H01L21/331;H01L21/8228;H01L27/082;(IPC1-7):H01L21/822;H01L21/30;H01L21/46 主分类号 H01L21/331
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